Variable-energy positron beam study of arsenic ...

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Title Variable-energy positron beam study of arsenic diffusion in poly-silicon
Author(s) Derek W. Lawther, R. Khatri, P. J. Simpson, P. J. Schultz, I. Calder, L. Weaver
Journal Applied Surface Science
Date 1995
Volume 85
Issue 1-4
Start page 265
End page 270
Abstract The positron beam technique is shown to be a sensitive indicator of the presence of arsenic within the grain boundaries of poly-silicon. Variable-energy positron beam and secondary-ion mass spectrometry studies have been performed on As+-implanted pre-amorphized Si samples as a function of dose and rapid thermal anneal temperature. Positron trapping within negatively-charged grain boundaries of the recrystallized poly-Si is observed, resulting in a similar to 2% elevation in the Doppler-broadening S lineshape parameter value. Infusion of As+-ions into the grain boundaries passivates the charge and reduces their specific positron-trapping rate.

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